1.

Conference Proceedings
Conference Proceedings
1. The simple and practical variable optical attenuator using a piezoelectric sheet containing an optical fiber [6374A-36]
Kim, S. ; Kang, H. ; Kang, S. ; Kim, W. ; Jeong, H. ; Cho, Y.
Pub. info.: Optomechatronic Actuators, Manipulation, and Systems Control.  pp.63740G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6374
2.

Conference Proceedings
Conference Proceedings
2. Real time analysis of the haze environment trapped betsween the pellicle film and the mask surface [6283-07]
Choi, J. ; Lee, S. ; Cho, Y. ; Ji, S. ; Cha, C. ; Choi, W. S. ; Han, S. W.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.62830A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283