Knight, T.J. ; Cheng, X. ; Krogh, B.H. ; Greve, D.W. ; Gibson, M.A.
Pub. info.:
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.157-166, 1995. Pennington, NJ. Electrochemical Society
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.84-93, 1997. Pennington, NJ. Electrochemical Society