1.

Conference Proceedings
Conference Proceedings
1. Application of Sampling Quadrupole Mass Spectrometry to Multivarible Process Control
Knight, T.J. ; Cheng, X. ; Krogh, B.H. ; Greve, D.W. ; Gibson, M.A.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.157-166,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
2.

Conference Proceedings
Conference Proceedings
2. Real-Time Control of PECVD Silicon Nitride Film Properties
Knight, T.J. ; Grave, D.W. ; Cheng, X. ; Krogh, B.H.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.688-699,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
3.

Conference Proceedings
Conference Proceedings
3. Model Predictive Control of Plasma Enhanced Chemical Vapor Deposition with Process Variable Constraints
Cheng, X. ; Knight, T.J. ; Greve, D.W. ; Krogh, B.H.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.84-93,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9