1.

Conference Proceedings
Conference Proceedings
1. MICROCRYSTALLITES IN OXIDIZED POROUS SILICON
Lehmann, V. ; Cerva, H. ; Jobst, B. ; Petrova-Koch, V. ; Kux, A. ; Muschik, T.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.247-250,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
2.

Conference Proceedings
Conference Proceedings
2. Characterization methods for semiconductor materials and device processing
Oppoizer, H. ; Budde, K. ; Cerva, H. ; Criegern, R.v. ; Jahnel, F. ; Lemme, R.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.351-362,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
3.

Conference Proceedings
Conference Proceedings
3. Process-Induced Defects in Silicon: A Never Ending Story?
Kolbesen, B.O. ; Cerva, H.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.19-37,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
4.

Conference Proceedings
Conference Proceedings
4. Characterization of Process-Induced Defects in Silicon Technology
Cerva, H. ; Hammerl, E. ; Lemme, R. ; Schwalke, U. ; Wangemann, K. ; Zoth, G.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.55-67,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
5.

Conference Proceedings
Conference Proceedings
5. Analytical aspects in transmission electron microscopy of semiconductors
Cerva, H.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.121-139,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
6.

Conference Proceedings
Conference Proceedings
6. PORE FORMATION AND PROPAGATION MECHANISM IN POROUS SILICON
Lehmann, V. ; Cerva, H. ; Gosele, U.
Pub. info.: Light emission from silicon : symposium held December 3-5, 1991, Boston, Massachusetts, U.S.A..  pp.3-6,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 256
7.

Conference Proceedings
Conference Proceedings
7. Aluminum Spiking Mechanism in Contact Holes Studied by High-Resolution Analytical TEM
Cerva, H. ; Kluppel, V. ; Barth, H. J. ; Helneder, H.
Pub. info.: Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A..  pp.115-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 523
8.

Conference Proceedings
Conference Proceedings
8. The Role of Metal Contamination and Crystal Defects in Quarter Micron Technology
Obry, M. ; Bergholz, W. ; Cerva, H. ; Kurner, W. ; Schrems, M. ; Sachse, J.-U. ; Winkler, R.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.133-149,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
9.

Conference Proceedings
Conference Proceedings
9. Microstructure Control of (Ba,Sr)TiO3 Films for Gigabit DRAM
Shen, H. ; Kotecki, D. E. ; Murphy, R. J. ; Zaitz, M. ; Laibowitz, R. B. ; Shaw, T. M. ; Saenger, K. L. ; Baniecki, J. ; Beitel, G. ; Klueppel, V. ; Cerva, H.
Pub. info.: Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A..  pp.33-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 493