1.

Conference Proceedings

Conference Proceedings
Palmateer,S.C. ; Cann,S.G. ; Curtin,J.E. ; Doran,S.P. ; Eriksen,L.M. ; Forte,A.R. ; Kunz,R.R. ; Lyszczarz,T.M. ; Stern,M.B. ; Nelson,C.M.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.634-642,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
2.

Conference Proceedings

Conference Proceedings
Fritze,M. ; Cann,S.G. ; Wyatt,P.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.567-581,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679