Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.340-345, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia. pp.401-407, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.1099-1104, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.369-375, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion. Part1 pp.466-471, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering