1.

Conference Proceedings
Conference Proceedings
1. Deflecting-fiber-type MEMS variable optical attenuator
Wu, M. ; Yang, C. ; Mao, X. ; Zhao, X. ; Cai, B.
Pub. info.: Fiber optic components, subsystems, and systems for telecommunications : 7-9 November 2001, Nanjing, China.  pp.61-66,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4604
2.

Conference Proceedings
Conference Proceedings
2. Hydrogen-induced actuation: a new active mechanism for MEMS
Zhang, Y. ; Ding, G. ; Yang, C. ; Yu, A. ; Cai, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.131-137,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
3.

Conference Proceedings
Conference Proceedings
3. Magnetically actuated MEMS variable optical attenuator
Li, W. ; Zhao, X. ; Cai, B. ; Zhou, G. ; Zhang, M.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.89-96,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
4.

Conference Proceedings
Conference Proceedings
4. MEMS-based variable optical attenuator
Dai, X. ; Zhao, X. ; Li, W. ; Cai, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.97-103,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
5.

Conference Proceedings
Conference Proceedings
5. Development of novel optical switches based on the MEMS electromagnetic micro-actuator
Jia, S. ; Zhao, X. ; Zhang, S. ; Cai, B. ; Feng, J.
Pub. info.: Semiconductor Optoelectronic Device Manufacturing and Applications.  pp.14-17,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4602
6.

Conference Proceedings
Conference Proceedings
6. Structual optimization of NiTi/Si diaphragm used in micropumps
Wang, L. ; Chen, J. ; Xu, D. ; Cai, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.153-160,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
7.

Conference Proceedings
Conference Proceedings
7. Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance
Cheng, X. ; Xu, D. ; Chen, J. ; Cai, B. ; Ding, G.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.147-152,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
8.

Conference Proceedings
Conference Proceedings
8. Numerical analysis of a composite diaphragm microactuator
Chen, J. ; Cai, B. ; Wang, L. ; Xu, D. ; Cheng, X.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.298-305,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
9.

Conference Proceedings
Conference Proceedings
9. Electrochemical studies of electrodeposition of nickel for LIGA microstructures
Ding, G. ; Zhang, Y. ; Liu, J. ; Zhao, X. ; Cai, B. ; Shen, T.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.306-311,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
10.

Conference Proceedings
Conference Proceedings
10. Surface relief of TiNiCu thin films
Cheng, X. ; Xu, D. ; Cai, B. ; Wang, L. ; Chen, J. ; Li, G. ; Xu, S.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.340-345,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601