Chen, L. ; Kang, C.S. ; Oralkan, O. ; Dumin, D.J. ; Brown, G.A. ; Bellutti, P.
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Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.88-98, 1997. Pennington, New Jersey. Electrochemical Society
Bellutti, P. ; Collini, A. ; Zorzi, N. ; Vaccari, G. ; Crippa, D.
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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.209-217, 1997. Pennington, NJ. Electrochemical Society
Bellutti, P. ; Collini, A. ; Ferrario, L. ; Zorzi, N ; Zen, M.
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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.204-208, 1997. Pennington, NJ. Electrochemical Society
Bellutti, P. ; Boscardin, M. ; Zen, M. ; Zorzi, N.
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The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.635-644, 1996. Pennington, NJ. Electrochemical Society