Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.121-126, 2001. Pennington, N.J.. Electrochemical Society
Moriceau, H. ; Fournel, F. ; Rayssac, O. ; Cartier, A.M. ; Morales, C. ; Pocas, S. ; Zussy, M. ; Jalaguier, E. ; Biasse, B. ; Bataillou, B. ; Papon, A.M. ; Lagahe, C. ; Aspar, B. ; Maleville, C. ; Leterte, F. ; Ghyselen, B. ; Barge, T.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.1-16, 2001. Pennington, NJ. Electrochemical Society