1.

Conference Proceedings
Conference Proceedings
1. *PHOTO-EXCITED CLEANING OF SILICON WITH CHLORINE AND FLUORINE
Ito, T. ; Sugino, R. ; Sato, Y. ; Okuno, M. ; Osawa, A. ; Aoyama, T. ; Yamazaki, T. ; Arimoto, Y.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.195-206,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Thin Film Head Design for High Density Recording
Sato, I. ; Aoyama, T. ; Soeno, Y.
Pub. info.: Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS).  pp.65-81,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-20
3.

Conference Proceedings
Conference Proceedings
3. Composition Self-Matching Phenomena in Chemical Vapor Deposition of (Ba, Sr) TiO3 Thin Films
Eguchi, K. ; Kyotoshi, M. ; Imai, K. ; Aoyama, T. ; Hieda, K. ; Arikado, T.
Pub. info.: Dielectric material integration for microelectronics.  pp.179-189,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-3
4.

Conference Proceedings
Conference Proceedings
4. Multifunctional Hyperstructured Molecules
Wada, T. ; Zhang, Y. ; Aoyama, T. ; Kubo, Y. ; Sasabe, H.
Pub. info.: Electrical, optical, and magnetic properties of organic solid-state materials IV : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.255-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 488