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11 results

Conference Proceedings

1. G2 Predictions of Group III Thermochemistry: Compounds Containing Aluminum

Allendorf, M.D. ; Melius, C. F.

Pub. info.:	Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.28-33, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-23

Conference Proceedings

2. Deposition of Titanium Nitride Films in a Stagnation Flow Reactor and Comparison With Model Predictions

Allendorf, M.D. ; Arsenlis, A. ; Bastasz, R. ; Evans, G.H. ; Larson, R.S. ; Schulberg, M.T.

Pub. info.:	Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.291-299, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-9

Conference Proceedings

3. Thermodynamics and kinetics of Gas-Phase Reactions in the Ti-C-CL-H System

Teyssandier, F. ; Allendorf, M.D. ; Ho, A.

Pub. info.:	Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.313-318, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-23

Conference Proceedings

4. Gas-Phase Kinetics in the TI-CL-H System

Teyssandier, F. ; Allendorf, M.D.

Pub. info.:	Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.15-22, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-25

Conference Proceedings

5. Quantum Chemistry: A Review of Ab Initio Methods and Their Use in Predicting Thermochemical Data for CVD Processes

Melius, C.F. ; Allendorf, M.D. ; Colvin, M.E.

Pub. info.:	Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1-14, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-25

Conference Proceedings

6. The Reactions of BCI3 and NH3 Relevant to the CVD of Boron Nitride

McDaniel, A.H. ; Allendorf, M.D.

Pub. info.:	Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.40-48, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-25

Conference Proceedings

7. The Pyrolitic Behavior of Trimethylindium in Flow-Tube Reactors

McDaniel, A.H. ; Allendorf, M.D.

Pub. info.:	Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.52-57, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-23

Conference Proceedings

8. Thermodynamics and Kinetics of Methyltricyhiorosilane Decomposition

Allendorf, M.D. ; Melius, C.F. ; Osterheld, T.H.

Pub. info.:	Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition. pp.20-26, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-2

Conference Proceedings

9. Thermochemistry of Gas-Phase Species Relevant to Titanium Nitride CVD

Allendorf, M.D. ; Janssen, C.L. ; Colvin, M.E. ; Melius, C.F. ; Nielsen, I.M.B. ; Osterheld, T.H. ; Ho, P.

Pub. info.:	Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.393-400, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-2

10.

Conference Proceedings

10. Chemical Reactions in the CVD of Boron Nitride from BCI, and NH3

Allendorf, M.D. ; Osterheld, T.H.

Pub. info.:	Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition. pp.16-22, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-5

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