1.

Conference Proceedings
Conference Proceedings
1. Thermodynamic rationale for heat conduction equation and dynamic boundary value problem for piezothermoelastic materials
Belyaev, A. K.
Pub. info.: Smart structures and materials 1999 : mathematics and control in smart structures : 1-4 March, 1999, Newport Beach, California.  pp.702-710,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3667
2.

Conference Proceedings
Conference Proceedings
2. X-ray phase-shift mask for proximity x-ray lithography with synchrotron radiation
Ezaki, M. ; Murooka, K.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.462-471,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
3.

Conference Proceedings
Conference Proceedings
3. Active vibration control using piezoelectric smart disks
Schothorst, G.van
Pub. info.: Smart structures and materials 1999 : mathematics and control in smart structures : 1-4 March, 1999, Newport Beach, California.  pp.637-648,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3667
4.

Conference Proceedings
Conference Proceedings
4. Evaluation of an advanced mask-writing system
Kubo, S. ; Hiruta, K. ; Sugiyama, M. ; Iwamatsu, T. ; Fujisawa, T. ; Morimoto, H.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.426-435,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
5.

Conference Proceedings
Conference Proceedings
5. Wavelet control model of suppressing beam plate vibration with piezoelectric sensors and actuators
Zhou, Y. -H. ; Wang, J. ; Zheng, X. ; Jiang, Q.
Pub. info.: Smart structures and materials 1999 : mathematics and control in smart structures : 1-4 March, 1999, Newport Beach, California.  pp.658-669,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3667
6.

Conference Proceedings
Conference Proceedings
6. Evaluation of the impact of pattern fidelity on photomask inspectability
Woolverton, K. S. ; Liu, C. ; Zwigl, P. ; Ruch, W.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.520-527,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
7.

Conference Proceedings
Conference Proceedings
7. Shipping, handling, and storage of reticles
Zhu, S. -B. ; Martin, R.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.446-455,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
8.

Conference Proceedings
Conference Proceedings
8. Piezoelectric displacement feedback control with time delay
Sloss, J. M. ; Adali, S. ; Sadek, I. S. ; Bruch, Jr. J. C.
Pub. info.: Smart structures and materials 1999 : mathematics and control in smart structures : 1-4 March, 1999, Newport Beach, California.  pp.649-657,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3667
9.

Conference Proceedings
Conference Proceedings
9. Progress in SiC membrane for x-ray mask
Shoki, T. ; Kurikawa, A. ; Kawahara, T. ; Sakurai, T.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.456-461,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
10.

Conference Proceedings
Conference Proceedings
10. New mask blank handling system for the advanced electron-beam writer EX-11
Yoshitake, S. ; Ooki, K. ; Ogawa, Y. ; Ogura, K. ; Yamamoto, T. ; Hirano, R. ; Toriumi, M. ; Tojo, T.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.436-445,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748