1.

Conference Proceedings
Conference Proceedings
1. Selective W for coating and releasing MEMS devices
Mani, S. S. ; Fleming, J. G. ; Sniegowski, J. J. ; Boer, M. P. de ; Irwin, L. W. ; Walraven, J. A. ; Tanner, D. M. ; LaVan, D. A.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.135-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
2.

Conference Proceedings
Conference Proceedings
2. Chemical vapor deposition coating for micromachines
Mani, S. S. ; Fleming, J. G. ; Sniegowski, J. J. ; Boer, M. P. de ; Irwin, L. W. ; Walraven, J. A. ; Tanner, D. M. ; Dugger, M. T.
Pub. info.: New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.21-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 616
3.

Conference Proceedings
Conference Proceedings
3. Experimental apparatus and software design for dynamic long-term reliability testing of a spring-mass MEMS device [6111-23]
Reu, P. L. ; Tanner, D. M. ; Epp, D. S. ; Parson, T. B. ; Boyce, B. L.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V.  pp.61110J-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6111