1.

Conference Proceedings

Conference Proceedings
Kim,D.-J. ; Oh,S.-H. ; Yeo,G.-S. ; Bae,Y.-G. ; Kim,J.-H. ; Kim,Y.-H.
Pub. info.: Metrology, inspection, and process control for microlithography XV.  4344  pp.667-672,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
2.

Conference Proceedings

Conference Proceedings
Kang,H.-J. ; Kim,B.-S. ; Park,J.-S. ; Kim,I.-S. ; Yeo,G.-S. ; Lee,J.-H. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1096-1103,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562