1.

Conference Proceedings
Conference Proceedings
1. Characterization of an inchworm actuator fabricated by polysilicon surface micromachining
Boer,M.P.de ; Luck,D.L. ; Walraven,J.A. ; Redmond,J.M.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.169-180,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings
Conference Proceedings
2. Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)
Walraven,J.A. ; Cole Jr.,E.I. ; Sloan,L.R. ; Hietala,S.L. ; Tigges,C.P. ; Dyck,C.W.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.254-259,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
3.

Conference Proceedings
Conference Proceedings
3. Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode
Walraven,J.A. ; Soden,J.M. ; Tanner,D.M. ; Tangyunyong,P. ; Cole Jr.,E.I. ; Anderson,R.E. ; Irwin,L.W.
Pub. info.: MEMS Reliability for Critical Applications.  pp.30-39,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180
4.

Conference Proceedings
Conference Proceedings
4. Failure analysis of tungsten-coated polysilicon micromachined microengines
Walraven,J.A. ; Mani,S.S. ; Fleming,J.G. ; Headley,T.J. ; Kotula,P.G. ; Pimentel,A.A. ; Rye,M.J. ; Tanner,D.M. ; Smith,N.F.
Pub. info.: MEMS Reliability for Critical Applications.  pp.49-57,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180