1.

Conference Proceedings

Conference Proceedings
Hong, Y.-K. ; Eom, D.-H. ; Park, J.-G.
Pub. info.: Thin film materials, processes, and reliability : proceedings of the international symposium.  pp.126-137,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-24
2.

Conference Proceedings

Conference Proceedings
Lee, J.M. ; Cho, S.H. ; Kim, T.H. ; Park, J.-G. ; Busnaina, A.A.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.441-444,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
3.

Conference Proceedings

Conference Proceedings
Eom, D.-H. ; Lee, S.-H. ; Kim, K.-S. ; Lee, C.-H. ; Park, J.-G.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.156-163,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
4.

Conference Proceedings

Conference Proceedings
Lee, S.-Y. ; Lee, S.-H. ; Eom, D.-H. ; Kim, K.-S. ; Song, H.-S. ; Park, J.-G.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.180-186,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
5.

Conference Proceedings

Conference Proceedings
Park, J.-G. ; Katoh, T. ; Yoo, H-C. ; Paik, U.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.202-209,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-1
6.

Conference Proceedings

Conference Proceedings
Katoh, T. ; Park, J.-G. ; Park, J.-H. ; Paik, U.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.193-201,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-1
7.

Conference Proceedings

Conference Proceedings
Eom, D.-H. ; Hong, Y.-K. ; Lee, S.-H. ; Park, J.-Y. ; Myung, J.-J. ; Park, J.-G. ; Kim, K.-S. ; Song, H.-S. ; Park, H.-S. ; Choi, Y.-S.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.226-236,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-1
8.

Conference Proceedings

Conference Proceedings
Eom, D.-H. ; Ryu, J.-S. ; Hong, Y.-K. ; Myung, J.-J. ; Kim, K.-S. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.44-51,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
9.

Conference Proceedings

Conference Proceedings
Kang, H.-G. ; Katoh, T. ; Lee, W.-M. ; Paik, U. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.215-222,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
10.

Conference Proceedings

Conference Proceedings
Katoh, T. ; Kim, S.-J. ; Paik, U. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.190-198,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21