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15 results

Conference Proceedings

1. Accurate proximity correction method with total-process proximity-based correction factor(TCF)

Hashimoto,K. ; Usui,S. ; Hasebe,S. ; Murota,M. ; Nakayama,T. ; Matsuoka,F. ; Inoue,S. ; Kobayashi,S. ; Yamamoto,K.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.224-233, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

2. Polarization-dependent losses of integrated optical splitters in glass

Hollenbach,U. ; Eckstein,H. ; Fabricius,N. ; Krause,M. ; Kobayashi,S.

Pub. info.:	Functional Photonic and Fiber Devices. pp.123-130, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2695

Conference Proceedings

3. Multidomain TN-LCD fabricated by photoalignment

Kobayashi,S. ; Iimura,Y.

Pub. info.:	Liquid Crystal Materials, Devices, and Applications V. pp.40-51, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3015

Conference Proceedings

4. Photoalignment control of LC and its applications to LCD fabrication (Invited Paper)

Iimura,Y. ; Akiyama,H. ; Li,X.T. ; Kobayashi,S.

Pub. info.:	Liquid Crystal Materials, Devices, and Applications VI. pp.8-18, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3297

Conference Proceedings

5. MD1:Optical disk system for digital video recording.

Narahara,T. ; Kobayashi,S. ; Hattori,M. ; Shimpuku,Y. ; Enden,G.van den ; Kahlman,J.A. ; Dijk,M.van ; Woudenberg,R.van

Pub. info.:	ISOM/ODS '99 : joint international symposium on Optical Memory and Optical Data Strage 1999, 11-15 July 1999 Sheraton Kauai Resort, Koloa, Howaii. pp.50-52, 1999. Bellingham, Washington. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3864

Conference Proceedings

6. Development of simplified process for KrF excimer halftone mask with chrome-shielding method

Kobayashi,S. ; Oka,N. ; Watanabe,K. ; Ohmori,K. ; Inoue,M. ; Iguchi,K.

Pub. info.:	19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part1 pp.288-296, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3873

Conference Proceedings

7. 1- kW slab CO2 laser excited by a self-excited rf generator

Kobayashi,S. ; Terai,K. ; Tamangawa,T.

Pub. info.:	XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK. pp.92-95, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3092

Conference Proceedings

8. Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers

Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.614-621, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

9. Recent development on silica waveguide technology for integrated optics

Kobayashi,S.

Pub. info.:	Integrated Optics Devices: Potential for Commercialization. pp.264-270, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2997

10.

Conference Proceedings

10. Morphology of Oxide Precipitates in Czochralski Silicon Crystals

Sueoka,K. ; Ikeda,N. ; Yamamoto,T. ; Kobayashi,S.

Pub. info.:	Shallow Impurities in Semiconductors : Proceedings of the Fifth International Conference on Shallow Impurities in Semiconductors "Physics and Control of Impurities", International Conference Center Kobe, Japan, 5 to 8 August, 1992. pp.523-524, 1993. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	117-118

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