Recent Developments of Cluster Ion Beam - From Nano-fabrication to Analysis of Bio-materials - — クラスターイオンビーム技術の最近の進展 - ナノ加工からバイオ材料評価まで - | 東京工業大学附属図書館文献データベース

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クラスターイオンビーム技術の最近の進展 - ナノ加工からバイオ材料評価まで -
Recent Developments of Cluster Ion Beam - From Nano-fabrication to Analysis of Bio-materials -

Author(s):

藤井麻樹子

Publication title:

真空 : journal of the Vacuum Society of Japan

Pub. Year:

2016

Vol.:

59

Issue:

5

Page(from):

113

Page(to):

120

Pages:

8

Pub. info.:

東京: 真空協会

ISSN:

18822398

Language:

Japanese

Type:

Academic Journal

Details

TDL ID:	ZA00066506
Note for article:	小特集:クラスターイオンビーム. 解説

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