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Robust Spin-Coating of Thin PDMS Films.

Author(s):
Publication title:
S.M.E. technical paper
Title of ser.:
SME Technical Paper : TP
Ser. no.:
2008
Pub. Year:
2008
No.:
TP08PUB047
Paper no.:
TP08PUB047
Pages:
7
Pub. info.:
Dearborn, Mich.: Society of Manufacturing Engineers
Language:
English
Call no.:
S42600
Type:
Technical Paper

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