Blank Cover Image

An Experimental Investigation of Material Removal Rate in Polishing of Silicon Wavers.

Author(s):
Publication title:
S.M.E. technical paper
Title of ser.:
SME Technical Paper : TP
Ser. no.:
2007
Pub. Year:
2007
No.:
TP07PUB113
Paper no.:
TP07PUB113
Pages:
8
Pub. info.:
Dearborn, Mich.: Society of Manufacturing Engineers
Language:
English
Call no.:
S42600
Type:
Technical Paper

Similar Items:

Pei, Z., Fisher, G.R.

Society of Manufacturing Engineers

Marshaus, J.G., Woulf, N.L., Orgish, K.M., Bower, G.R.

Society of Automotive Engineers

Peii, Z.J., Fisher, G.R., Strasbaugh, A.

Society of Manufacturing Engineers

Ricart,L.M., Xin,J., Bower,G.R., Reitz,R.D.

Society of Automotive Engineering, Inc.

Sun, W.P., Pei, Z.J., Lee, E.S., Fisher, G.R.

Society of Manufacturing Engineers

Cheng, L.H., Cheng, G.L., Zhang, L., Chen, H.L., Gao, C.J.

Society of Automotive Engineers

ZHANG J.M., PEI Z.J., SUN J.G.

Society of Manufacturing Engineers

Grimm,T.R., Johnson,D.M., Kajander,J.E., Viegelahn,G.L.

Society of Automotive Engineers

Zhang, J.M., Pei, Z.J., Sun, J.G.

Society of Manufacturing Engineers

Ho, H., Tsai, M.Y., Morton, J., Farley, G.L.

National Aeronautics and Space Adminstration

Khanna, Nitin, Pei, Z.J., Ferreira, Placid M.

Society of Manufacturing Engineers

Mo, H. L., Prattipati, R., Lin, C. X., Ebadian, M. A.

American Society of Mechanical Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12