Application of Beam Splitters and Position Sensing Detectors to Measure Five-Degree-of-Freedom Geometric Errors with Miniaturized Linear Motion Stage

Application of Beam Splitters and Position Sensing Detectors to Measure Five-Degree-of-Freedom Geometric Errors with Miniaturized Linear Motion Stage

Author(s):

Publication title:

S.M.E. technical paper

Title of ser.:

SME Technical Paper : TP

Ser. no.:

2006

Pub. Year:

2006

No.:

TP06PUB139

Paper no.:

TP06PUB139

Pages:

8

Pub. info.:

Dearborn, Mich.: Society of Manufacturing Engineers

Language:

English

Call no.:

S42600

Type:

Technical Paper

Details

TDL ID:	ZA00052157
Series ID:	PA00000134
Note for article:	NAMRC Thirty-Four, Milwaukee, Wisconsin, 2006.06.24-2006.06.26

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