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Design of a Rapid Thermal Processing Chamber Using an Inverse Formulation.

Author(s):
Publication title:
AIAA paper
Title of ser.:
AIAA Paper : AIAA/ASME Joint Thermophysics and Heat Transfer Conference
Ser. no.:
2002
Pub. Year:
2002
No.:
2002-2904
Paper no.:
2002-2904
Pages:
8
Pub. info.:
American Institute of Aeronautics and Astronautics
ISSN:
01463705
Language:
English
Call no.:
A07400
Type:
Technical Paper

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