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Maglev 6- DOF Stage for Nanopositioning.

Author(s):
Publication title:
A.S.M.E. paper
Title of ser.:
ASME Technical Paper : IMECE
Ser. no.:
2003
Pub. date:
2003
Serial:
IMECE2003-42708
Paper no.:
IMECE2003-42708
Pages:
8
Pub. info.:
New York, NY: American Society of Mechanical Engineers
Language:
English
Call no.:
A11800
Type:
Technical Paper

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