Design Sensitivity Analysis for the Performance Improvement of High-Q MEMS Resonators

Design Sensitivity Analysis for the Performance Improvement of High-Q MEMS Resonators

Author(s):

Publication title:

A collection of technical papers : 43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference : 10th AIAA/ASME/AHS Adaptive Structures Forum : 4th AIAA Non-Deterministic Approaches Forum : 3rd AIAA Gossamer Spacecraft Forum, Denver, Colorado, 22-25 April 2002

Title of ser.:

AIAA Paper : AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference

Ser. no.:

2002

Pub. Year:

2002

Vol.:

v. 2

No.:

2002-1351

Paper no.:

AIAA-2002-1351

Page(from):

1139

Page(to):

1147

Pages:

9

Pub. info.:

Reston, VA: American Institute of Aeronautics and Astronautics

ISBN:

9781563475429 [1563475421]

Language:

English

Call no.:

A07400/021200 (v.2)

Type:

Technical Paper

Details

TDL ID:	ZA00001443
Series ID:	PA00000154
Conf. info. (Name):	AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference ; AIAA/ASME/AHS Adaptive Structures Forum ; AIAA Non-Deterministic Approaches Forum ; AIAA Gossamer Spacecraft Forum
Conf. info. (Number):	43rd ; 10th ; 4th ; 3rd
Conf. info. (Venue):	Denver, Colorado
Conf. info. (Date):	2002.04.22-2002.04.25

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