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Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

Author(s):
Publication title:
NASA Technical Reports
Pub. date:
1996
Vol.:
19960038261
Issue:
NASA-TM-111685
Pt.:
NAS 1.15:111685
Paper no.:
N96-30741
Page(from):
1
Page(to):
8
Pages:
8
Pub. info.:
National Aeronautics and Space Adminstration
Language:
English
Type:
Technical Paper

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