Study of InGaAs Based MODEFET Structures Using Variable Angle Spectroscopic Ellipsometry

Study of InGaAs Based MODEFET Structures Using Variable Angle Spectroscopic Ellipsometry

Author(s):

Alterovitz, S.A. ( Lewis Research Center )

Sieg, R.M. ( Cleveland State University )

Yao, H.D. ( University of Nebraska )

Snyder, P.G.

Woollam, J.A.

Pamulapati, J. ( University of Michigan )

Bhattacharya, P.K.

Sekula-Moise, P.A. ( Spire Corporation )

3 more

Publication title:

NASA Technical Reports

Pub. Year:

1991

Issue:

NASA-TM-103792

Pt.:

NAS 1.15:103792

Paper no.:

N91-19935

Page(from):

1

Page(to):

13

Pages:

13

Pub. info.:

National Aeronautics and Space Adminstration

Language:

English

Type:

Technical Paper

Details

TDL ID:

ZA00001427

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