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DIFFUSION BARRIERS IN SEMICONDUCTOR CONTACT METALIZATION.

Author(s):
Kattelus, H. ( TECH. RES. CENTRE OF FINLAND, ESPOO )  
Publication title:
NASA Technical Reports(N89)
Pub. Year:
1988
Issue:
VTT-RR-48
Paper no.:
N89-15764
Page(from):
1
Page(to):
125
Pages:
125
Pub. info.:
National Aeronautics and Space Administration
Language:
English
Type:
Technical Paper

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