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STRUCTURE AND PROPERTIES OF TITANIUM NITRIDE AND ZIRCONIUM NITRIDE THIN FILMS PREPARED BY REACTIVE ION PLATING

Author(s):
MOLARIUS, J. M. ( HELSINKI UNIV. OF TECHNOL., ESPOO )  
Publication title:
NASA Technical Reports(N88-)
Pub. date:
1987
Serial:
N88-22167
Paper no.:
N88-22167
Page(from):
1
Page(to):
83
Pages:
83
Pub. info.:
National Aeronautics and Space Administration
Language:
English
Type:
Technical Paper

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