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A STUDY OF REACTIVE PLASMA DEPOSITED THIN FILMS Semiannual Progress Report

Author(s):
Gilchrist, J. ( North Carolina Agricultural and Technical )  
Publication title:
NASA Technical Reports
Pub. date:
1986
Issue:
NASA-CR-179834
Serial:
G3/76 43207
Pt.:
NAS1.26:179834
Paper no.:
N87-14167
Page(from):
1
Page(to):
19
Pages:
19
Pub. info.:
National Aeronautics and Space Administration
Language:
English
Type:
Technical Paper

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