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High-Quality Silicon Films Prepared by Zone-Melting Recrystallization

Author(s):
  • Chen, C. K. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Geis, M. W. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Tsaur, B-Y ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Fan, C. C. ( Lincoln Laboratory, Massachusetts Institute of Technology )
Publication title:
NASA Technical Reports
Pub. date:
1984
Issue:
NASA-CR-173746
Serial:
G3/76 19875
Pt.:
NAS 1.26:173746
Paper no.:
N84-28638
Page(from):
1
Page(to):
18
Pages:
18
Pub. info.:
National Aeronautics and Space Administration
Language:
English
Type:
Technical Paper

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