Simulations of dielectric etch in high density plasmas reactors

Simulations of dielectric etch in high density plasmas reactors

Author(s):

Johannes, Justine ( Sandia National Laboratories )

Meeks, Ellen ( Sandia National Laboratories )

Bartel, Timothy ( Sandia National Laboratories )

Hebner, Greg ( Sandia National Laboratories )

Miller, Paul ( Sandia National Laboratories )

Economou, Demetre ( Chemical Engineering Department, University of Houston )

Feldsein, John ( Chemical Engineering Department, University of Houston )

Dalton, Timothy ( Digital Equipment Corporation )

3 more

Publication title:

AIAA paper

Title of ser.:

AIAA Paper : AIAA Fluid Dynamics Conference

Ser. no.:

1998

Pub. Year:

1998

No.:

98-2983

Paper no.:

98-2983

Page(from):

1

Page(to):

9

Pub. info.:

American Institute of Aeronautics and Astronautics

ISSN:

01463705

Language:

English

Call no.:

A07400

Type:

Technical Paper

Details

TDL ID:	ZA00050855
Series ID:	PA00000147
Conf. info. (Name):	AIAA Fluid Dynamics Conference
Conf. info. (Number):	29th
Conf. info. (Venue):	Albuquerque, NM
Conf. info. (Date):	1998.06.15-1998.06.18
Note for article:	29th AIAA Fluid Dynamics Conference, June 15-18, 1998/Albuquerque, NM

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