Elektronenstrahlbelichtung fur hochintegrierte Schaltungen
- Author(s):
- Hersener, Jurgen ( AEG-TELEFUNKEN Serienprodukte AG )
- Zimmermann, Harald ( AEG-TELEFUNKEN Serienprodukte AG )
- Publication title:
- NASA Technical Reports
- Pub. Year:
- 1983
- No.:
- N83-35300
- Paper no.:
- N83-35300
- Page(from):
- 1
- Page(to):
- 93
- Pages:
- 93
- Pub. info.:
- National Aeronautics and Space Administration
- Language:
- German
- Type:
- Technical Paper
Similar Items:
National Aeronautics and Space Administration |
National Aeronautics and Space Administration |
National Aeronautics and Space Administration |
American Institute of Aeronautics and Astronautics |
National Aeronautics and Space Administration |
American Institute of Aeronautics and Astronautics |
Society of Automotive Engineers |
10
Technical Paper
Operational experience with the world's first offshore turboexpanders with magnetic bearings
The American Society of Mechanical Engineers |
5
Technical Paper
System Modeling and Computation for Total Life Cycle Assessments of Automotive Parts and Systems
Society of Automotive Engineers |
Society of Automotive Engineers |
National Aeronautics and Space Administration |
Society of Automotive Engineering, Inc. |