DOTIERUNGSPROFIL-MESSTECHNIK IN DER HALBLEITERTECHNOLOGIE
- Author(s):
- Goldbach, Gunter ( AEG-TELEFUNKEN AG Fachbereich Elektronische Bauelemente Theresienstrass 2 )
- Rosch, Ekkehard ( AEG-TELEFUNKEN AG Fachbereich Elektronische Bauelemente Theresienstrass 2 )
- Wallis, Detlev ( AEG-TELEFUNKEN AG Fachbereich Elektronische Bauelemente Theresienstrass 2 )
- Publication title:
- NASA Technical Reports
- Pub. Year:
- 1983
- Issue:
- BMFT-FB-T-83-126
- Paper no.:
- N84-11972
- Page(from):
- 1
- Page(to):
- 108
- Pages:
- 108
- Pub. info.:
- National Aeronautics and Space Administration
- Language:
- German
- Type:
- Technical Paper
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