Structure Stability and Mechanical Property of Y2O3 Thin Films Deposited by Reactive Magnetron Sputtering

Structure Stability and Mechanical Property of Y₂O₃ Thin Films Deposited by Reactive Magnetron Sputtering

Author(s):

P.F. Yu

Publication title:

IUMRS International Conference in Asia

Title of ser.:

Materials science forum

Ser. no.:

898

Pub. Year:

2017

Pt.:

2

Page(from):

1516

Page(to):

1523

Pages:

8

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783035711516 [3035711518]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00066570
Series ID:	PA00000012
Conf. info. (Name):	IUMRS International Conference in Asia (IUMRS-ICA)
Conf. info. (Number):	2016
Conf. info. (Venue):	Qingdao, China
Conf. info. (Date):	2016.10.20-2016.10.24
Note for article:	IUMRS International Conference in Asia (IUMRS-ICA), Qingdao, China, October 20-24, 2016

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