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Effect of Annealing on the Characteristics of Ti/Al Ohmic Contacts to p-Type 4H-SiC

Author(s):
Y.D. Tang
H.J. Shen
X.F. Zhang
F. Guo
Y. Bai
Z.Y. Peng
X.Y. Liu
2 more
Publication title:
Silicon Carbide and Related Materials 2016
Title of ser.:
Materials science forum
Ser. no.:
897
Pub. Year:
2017
Page(from):
395
Page(to):
398
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710434 [3035710430]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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