Blank Cover Image

Investigation of the Surface Morphology and Stacking Fault Nucleation on the (000-1)C Facet of Heavily Nitrogen-Doped 4H-SiC Boules

Author(s):
K. Ohtomo
N. Matsumoto
K. Ashida
T. Kaneko
N. Ohtani
M. Katsuno
S. Sato
H. Tsuge
T. Fujimoto
4 more
Publication title:
Silicon Carbide and Related Materials 2016
Title of ser.:
Materials science forum
Ser. no.:
897
Pub. Year:
2017
Page(from):
189
Page(to):
192
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710434 [3035710430]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Observation of the Surface Morphology on the (0001)C Facet of 4H-SiC Boules

T. Yamaguchi, S. Sato, N. Ohtani, M. Katsuno, T. Fujimoto

Trans Tech Publications
7 Conference Proceedings Interaction of 6H-Type Stacking Faults with Threading Screw Dislocations in PVT-Grown 4H-SiC Single Crystals

S. Sato, T. Fujimoto, H. Tsuge, M. Katsuno, W. Ohashi

Trans Tech Publications
2 Conference Proceedings SEM and ECC Imaging Study of Step-Bunched Structure on 4H-SiC Epitaxial Layers

Y. Tabuchi, M. Sonoda, K. Ashida, T. Kaneko, N. Ohtani, M. Katsuno, S. Sato, H. Tsuge, T. Fujimoto

Trans Tech Publications
8 Conference Proceedings Formation of Double Stacking Faults from Polishing Scratches on 4H-SiC (0001) Substrate

S. Ushio, T. Fujimoto, H. Tsuge, M. Katsuno, S. Sato

Trans Tech Publications
3 Conference Proceedings Stacking Fault Formation in Highly Nitrogen-Doped 4H-SiC Substrates with Different Surface Preparation Conditions

M. Katsuno, M. Nakabayashi, T. Fujimoto, N. Ohtani, H. Yashiro

Trans Tech Publications
9 Conference Proceedings Structural Transformation from TSDs to Frank-Type Stacking Faults by Giant Bunched Steps in PVT-Grown 4H-SiC Single Crystals

S. Sato, T. Fujimoto, H. Tsuge, M. Katsuno, M. Nakabayashi

Trans Tech Publications
4 Conference Proceedings Micro-Raman Scattering Study of Strain Fields in Homo-Epitaxial Layer on Nitrogen- Doped 4H-SiC Substrate

D. Fukunaga, N. Ohtani, M. Katsuno, S. Sato, H. Tsuge, T. Fujimoto

Trans Tech Publications
10 Conference Proceedings Fundamental Study of Sublimation-Recrystallization Phenomena in PVT-Growth of SiC Single Crystals

T. Fujimoto, N. Ohtani, S. Sato, M. Katsuno, H. Tsuge

Trans Tech Publications
5 Conference Proceedings Temperature Dependent Stability of Stacking Fault in Highly Nitrogen-Doped 4H-SiC Crystals

C. Taniguchi, A. Ichimura, N. Ohtani, M. Katsuno, T. Fujimoto

Trans Tech Publications
11 Conference Proceedings Structural Analysis of Dislocations in Highly Nitrogen-Doped 4H-SiC Substrates

M. Katsuno, N. Ohtani, M. Nakabayashi, T. Fujimoto, H. Yashiro

Trans Tech Publications
6 Conference Proceedings High Resolution X-Ray Diffraction (HRXRD) Studies of the Initial Stages of PVT-Growth of 4H-SiC Crystals

N. Ohtani, M. Katsuno, T. Fujimoto, S. Sato, H. Tsuge

Trans Tech Publications
12 Conference Proceedings Growth of Crack-Free 100mm-Diameter 4H-SiC Crystals with Low Micropipe Densities

M. Nakabayashi, T. Fujimoto, M. Katsuno, N. Ohtani, H. Tsuge

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12