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Atomic Layer Deposited Protective Layers

Author(s):
Publication title:
THERMEC 2016
Title of ser.:
Materials science forum
Ser. no.:
879
Pub. Year:
2017
Pt.:
2
Page(from):
1086
Page(to):
1092
Pages:
7
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035711295 [3035711291]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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