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The Mechanical Properties of TiN Films Grown by a Pure N2 Plasma Sputtering

Author(s):
B.S. Jang
C.H. Lee
J.W. Choi
J.S. Kwon
H.K. Kim
C.H. Park
H.M. Kim
2 more
Publication title:
Advanced Materials Design and Mechanics IV
Title of ser.:
Materials science forum
Ser. no.:
878
Pub. date:
2017
Page(from):
89
Page(to):
95
Pages:
7
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710601 [3035710600]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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