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Study on Influence of Silicon Crystal Dislocation on Removal in Atmospheric Pressure Plasma Polishing

Author(s):
Publication title:
Advanced Materials Design and Mechanics IV
Title of ser.:
Materials science forum
Ser. no.:
878
Pub. Year:
2017
Page(from):
83
Page(to):
88
Pages:
6
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710601 [3035710600]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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