Experiment on Chemical Magnetorheological Finishing of SiC Single Crystal Wafer

Experiment on Chemical Magnetorheological Finishing of SiC Single Crystal Wafer

Author(s):

Publication title:

Advances in Abrasive Technology XIX

Title of ser.:

Materials science forum

Ser. no.:

874

Pub. Year:

2016

Page(from):

407

Page(to):

414

Pages:

8

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783035710342 [3035710341]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00066546
Series ID:	PA00000012
Conf. info. (Name):	International Symposium on Advances in Abrasive Technology (ISAAT 2016)
Conf. info. (Number):	19th
Conf. info. (Venue):	Stockholm, Sweden
Conf. info. (Date):	2016.10.02-2016.10.05
Note for article:	19th International Symposium on Advances in Abrasive Technology (ISAAT 2016), Stockholm, Sweden, October 2-5, 2016

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