OPC modeling by genetic algorithm
- Author(s):
W.C. Huang C.M. Lai B. Luo C.K. Tsai C.S. Tsay C.W. Lai C.C. Kuo R.G. Liu H.T. Lin B.J. Lin - Publication title:
- Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5754
- Pub. Year:
- 2005
- Pt.:
- 2
- Page(from):
- 1229
- Page(to):
- 1240
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457349 [0819457345]
- Language:
- English
- Call no.:
- P63600/5754
- Type:
- Conference Proceedings
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