Blank Cover Image

Potential of solid immersion lithography using I-line and KrF light source

Author(s):
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
2
Page(from):
1049
Page(to):
1055
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

Similar Items:

Milster, T., Chen, T., Nam, D., Schlesinger, T. E.

SPIE - The International Society of Optical Engineering

D. W. Brown, P. O'Keeffe, V. B. Fleurov, R. Rokitski, R. Bergstedt, I. V. Fomenkov, K. O'Brien, N. R. Farrar, W. N. …

SPIE - The International Society of Optical Engineering

Nam, D., Milster, T. D., Chen, T.

SPIE - The International Society of Optical Engineering

T. Suzuki, K. Kakizaki, T. Matsunaga, S. Tanaka, Y. Kawasuji, M. Shimbori, M. Yoshino, T. Kumazaki, H. Umeda, H. Nagano, …

SPIE - The International Society of Optical Engineering

Hirota, Kusato, Jo, Joshua S., Milster, Tom D.

SPIE

Akhavan,F., Milster,T.D.

SPIE - The International Society for Optical Engineering

Jo,J.S., Milster,T.D.

SPIE-The International Society for Optical Engineering

Petersen,J.S., Williams,A.M., Rich,G.K., Miller,D.A., Martinez,A.M.,Jr.

SPIE-The International Society for Optical Engineering

Chen, T., Felix, D., Park, S. -K., Hauser, P., McCarthy, B., Sarid, D., Poweleit, C., Menendez, J., Milster, T. D.

SPIE - The International Society of Optical Engineering

Shimura,K., Milster,T.D., Hirota,K., Io,J.S.

SPIE - The International Society for Optical Engineering

Gillespie, W. D., Ishihara, T., Partlo, W. N., Ferguson, G. X., Simon, M. R.

SPIE - The International Society of Optical Engineering

Blumenstock, G. M., Meinert, C., Farrar, N. R., Yen, A.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12