Blank Cover Image

Alignment robustness for 90 nm and 65 nm node through copper alignment mark integration optimization

Author(s):
Scott Warrick
Paul Hinnen
Rob Morton
Kevin Cooper
Pierre-Olivier Sassoulas
Jerome Depre
Ramon Navarro
Richard van Haren
Clyde Browning
Doug Reber
Henry Megens
6 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. date:
2005
Pt.:
2
Page(from):
854
Page(to):
864
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

Similar Items:

Warrick, S., Hinnen, P., Morton, R., Cooper, K., Sassoulas, P.-O., Depre, J., Navarro, R., van Haren, R., Browning, C., …

SPIE - The International Society of Optical Engineering

Jaap H. M. Neijzen, Robert D. Morton, Peter Dirksen, Henry J. L. Megens, Frank Bornebroek

SPIE - The International Society of Optical Engineering

Weisbuch, F., Warrick, S., Conley, W., Depre, J.

SPIE - The International Society of Optical Engineering

Laplanche, Y., Charpin, M., Pain, L., Todeschini, J., Henry, D., Sassoulas, P.-O., Gough, S., Weidenmueller, U., …

SPIE-The International Society for Optical Engineering

H. Megens, R. van Haren, S. Musa, M. Doytcheva, S. Lalbahadoersing, M. van Kemenade, H. Lee, P. Hinnen, F. van Bilsen

SPIE - The International Society of Optical Engineering

M. Miyasaka, H. Saito, T. Tamura, T. Uchiyama, P. Hinnen, H. Lee, M. van Kemenade, M. Shahrjerdy, R. van Leeuwen

SPIE - The International Society of Optical Engineering

Warrick, S.P., Hinnen, P.C., van Haren, R.J., Smith, C.J., Megens, H.J., Fu, C.-C.

SPIE-The International Society for Optical Engineering

Trybula, W.J.

SPIE-The International Society for Optical Engineering

Huijbregste, J., Haren, R.J.F., Jeunink, A., Hinnen, P.C., Swinnen, B., Navarro, R., Simons, G., Bilsen, F., Tolsma, H., …

SPIE-The International Society for Optical Engineering

Terashita, Y., Shizukuishi, M., Shite, H., Kyoda, H., Oshima, K., Yoshihara, K.

SPIE - The International Society of Optical Engineering

P. Hinnen, J. Depre, S. Tanaka, S. Lim, O. Brioso, M. Shahrjerdy, K. Ishigo, T. Kono, T. Higashiki

SPIE - The International Society of Optical Engineering

Belledent, J., Shang, S.D., Trouiller, Y., Miramond, C., Patterson, K., Toublan, O.R., Couderc, C., Sundermann, F., …

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12