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Illumination and multi-step OPC optimization to enhance process margin of the 65nm node device exposed by dipole illumination

Author(s):
Soo-Han Choi
Tae-Hoon Park
Eunsung Kim
Hyoung-Joo Youn
Dae-Youp Lee
Yong-Chan Ban
A-Young Je
Dong-Hyun Kim
Ji-Suk Hong
Yoo-Hyon Kim
Moon-Hyun Yoo
Jeong-Taek Kong
7 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
2
Page(from):
838
Page(to):
845
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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