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High-precision large-diameter single-crystal silicon spheres: their fabrication and measurements of sphericity

Author(s):
Publication title:
Optical manufacturing and testing : 9-11 July, 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2536
Pub. Year:
1995
Page(from):
302
Page(to):
316
Pages:
15
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418951 [0819418951]
Language:
English
Call no.:
P63600/2536
Type:
Conference Proceedings

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