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Subwavelength photoresist grating metrology using scatterometry

Author(s):
Publication title:
Application and theory of periodic structures : 10-12 July, 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2532
Pub. Year:
1995
Page(from):
251
Page(to):
261
Pages:
11
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418913 [0819418919]
Language:
English
Call no.:
P63600/2532
Type:
Conference Proceedings

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