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Atmospheric rf plasma coating of indium and tin oxide films

Author(s):
Publication title:
Optical materials technology for energy efficiency and solar energy conversion XIV : 12-13 July 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2531
Pub. Year:
1995
Page(from):
333
Page(to):
344
Pages:
12
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418906 [0819418900]
Language:
English
Call no.:
P63600/2531
Type:
Conference Proceedings

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