Mask metrology system XY-5i for 256-Mbit DRAM
- Author(s):
- Publication title:
- Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2512
- Pub. Year:
- 1995
- Page(from):
- 207
- Page(to):
- 217
- Pages:
- 11
- Pub. info.:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819418708 [0819418706]
- Language:
- English
- Call no.:
- P63600/2512
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Image sensing method and defect detection algorithm for a 256-Mb and 1-Gb DRAM mask inspection system
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
Society of Photo-optical Instrumentation Engineers |
4
Conference Proceedings
Electrical characterization of across-field lithographic performance for 256-Mbit DRAM technologies
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
New die-to-database mask inspection system with i-line optics for 256-Mb and 1-Gb DRAMs
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Analytical and High-Resolution TEM Characterizations for Nanoscale Fractured Interfaces in Deep-Subquarter-Micron 256MBit DRAM Devices
Materials Research Society |
6
Conference Proceedings
Gray map reference pattern generator of a die-to-database mask inspection system for 256-Mb and 1-Gb DRAMs
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Pass transistor and isolation design methodology and its implementation for improved manufacturability for 256-Mbit DRAM and beyond
SPIE-The International Society for Optical Engineering |