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Laser surface processing of thin films for microelectronics applications

Author(s):
M. Takai  
Publication title:
ALT '94 International Conference : laser methods of surface treatment and modification : 5-9 September 1994, Konstanz, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2498
Pub. Year:
1995
Page(from):
2
Page(to):
10
Pages:
9
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418555 [0819418552]
Language:
English
Call no.:
P63600/2498
Type:
Conference Proceedings

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