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Silicon micromachining and its impact on materials and device properties: plasma etching damage issues

Author(s):
Publication title:
Smart structures and materials 1995 : Smart electronics : 2-3 March 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2448
Pub. Year:
1995
Page(from):
130
Page(to):
140
Pages:
11
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417978 [0819417971]
Language:
English
Call no.:
P63600/2448
Type:
Conference Proceedings

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